Microelectromechanical Systems
General
- Code: 46.01
- Semester: Optional D1 4th
- Study Level: Undergraduate
- Course type: Optional
- Teaching and exams language: Ελληνικά
- The course is offered to Erasmus students
- Teaching Methods (Hours/Week): Theory (2) / Exercises (1)
- ECTS Units: 4
- Course homepage: https://exams-sm.the.ihu.gr/course/view.php?id=106
- Instructors: Kiziroglou Michail
Course Contents
1. Introduction to MEMS
2. Importance and capabilities
3. Scaling
4. MEMS materials
5. Micromachining techniques
6. Lithography
7. Process flows
8. MEMS Electronics
9. MEMS Mechanics
10. MEMS Application 1 (Micro-Energy)
11. MEMS Application 2 (Micro-Robots)
12. MEMS Foundries
13. Summary
Educational Goals
KNOWLEDGE
Understanding of the Micro-Electro-Mechanical-Systems (MEMS) fabrication processes
Understanding of operating principles of micro-sensors, micro-actuators and micro-generators
Understanding of the main successful examples of MEMS technology
ABILITIES
Design of MEMS devices
Process flow design for the fabrication of MEMS.
Evaluation of the prospects for new microsystems
Use of MEMS methods and services in the production process
General Skills
Search, analysis and synthesis of data and information, using corresponding technologies, Adaptation to new situations, Independent work, Teamwork – Respect to the natural environment, Promotion of free, creative and inductive thinking
Teaching Methods
Lectures, Exercises, Online guidance, Projected Presentations, E-mail communication, Online Synchronous and Asynchronous Teaching Platform (moodle).
Students Evaluation
Assessment Language: English / Greek
Public Presentations
Practical mid-term examination
Final Written Examinations
Evaluation criteria:
Ability to design MEMS Systems
Ability to design fabrication process flows.
Ability to select and apply MEMS devices in real applications
Recommended Bibliography
Microsystem Design, Stephen D. Senturia, ISBN: 9780306476013, 2001
Introduction to Solid State Physics 8th Edition, Charles Kittel, ISBN-13: 978-0471415268, 2004