Courses

Microelectromechanical Systems

General

Course Contents

1. Introduction to MEMS
2. Importance and capabilities
3. Scaling
4. MEMS materials
5. Micromachining techniques
6. Lithography
7. Process flows
8. MEMS Electronics
9. MEMS Mechanics
10. MEMS Application 1 (Micro-Energy)
11. MEMS Application 2 (Micro-Robots)
12. MEMS Foundries
13. Summary

Educational Goals

KNOWLEDGE
Understanding of the Micro-Electro-Mechanical-Systems (MEMS) fabrication processes
Understanding of operating principles of micro-sensors, micro-actuators and micro-generators
Understanding of the main successful examples of MEMS technology
ABILITIES
Design of MEMS devices
Process flow design for the fabrication of MEMS.
Evaluation of the prospects for new microsystems
Use of MEMS methods and services in the production process

General Skills

Search, analysis and synthesis of data and information, using corresponding technologies, Adaptation to new situations, Independent work, Teamwork – Respect to the natural environment, Promotion of free, creative and inductive thinking

Teaching Methods

Lectures, Exercises, Online guidance, Projected Presentations, E-mail communication, Online Synchronous and Asynchronous Teaching Platform (moodle).

Students Evaluation

Assessment Language: English / Greek
Public Presentations
Practical mid-term examination
Final Written Examinations
Evaluation criteria:
Ability to design MEMS Systems
Ability to design fabrication process flows.
Ability to select and apply MEMS devices in real applications

Recommended Bibliography

Microsystem Design, Stephen D. Senturia, ISBN: 9780306476013, 2001
Introduction to Solid State Physics 8th Edition, Charles Kittel, ISBN-13: 978-0471415268, 2004